PETALUMA, Calif. (Business Wire) -- Capacity Expansion and Factory Automation Requirements Drive System Purchase for Compound Semiconductor Production
Tegal Corporation (NASDAQ:TGAL) today announced that a leading wireless component supplier has placed a multiple system order for Advanced Control System (ACS) i901 series diode plasma etch systems. The i901 etch systems will expand this supplier's existing production capacity in gallium arsenide (GaAs) semiconductors, which are widely used in wireless communication products. This follow-on order was based on the excellent performance of the Tegal 901 tools currently on-site, along with Tegal's technical support, process development expertise, and experience in etching specialty materials on non-standard substrates. The tool purchase is part of an overall plan to add production capacity and enhance factory automation support while maintaining compatibility with existing production processes.
"Tegal has a long history with this premier supplier of high performance integrated circuits that enable wireless communications," said Vahan Tchakerian, Tegal's Vice President of Sales and Field Operations. "We are committed to continuously improving our offerings to producers of wireless components, and this order for our new i901 system with ACS is additional confirmation that the advanced software and hardware upgrades available only with the i-series platform offer customers enhanced value. We are very pleased to be rewarded with this repeat order from an important customer."
The Tegal i901 is the latest in a series of diode plasma etch systems produced by Tegal for companies around the world. Over 1,500 systems have been shipped and continue to provide reliable and cost-effective support for a wide range of processes. The Tegal 901 is intended for a wide variety of applications, including pad, zero layer, non-selective nitride, backside and planarization, as well as oxide, nitride, poly and compound materials applications, such as GaAs. The platform incorporates a production-proven transport system that can accommodate 75 mm to 200 mm round, square or rectangular substrates.
The ACS upgrade is available as a field or factory retrofit for the existing installed base of 900 and 980 series systems. It features a fully integrated graphical user interface, parametric data logging, full factory automation support, and throughput enhancements for the wafer-handling system. For information on the 900 series ACS upgrade package, please contact your local Tegal representative or email info@tegal.com.
Safe Harbor Statement
The statements in this news release are forward-looking statements that involve a number of risks and uncertainties. As discussed in Tegal's annual report on Form 10-K for the fiscal year ended March 31, 2003, assumptions relating to the foregoing involve judgments with respect to, among other things, the ability of Tegal to successfully implement its business strategy; future economic, competitive and market conditions, including those in Europe and Asia and those related to Tegal's strategic markets; whether the products offered by Tegal will continue to achieve customer acceptance, and future business decisions, all of which are difficult or impossible to predict accurately and many of which are beyond the control of Tegal. Although Tegal believes that the assumptions underlying the forward-looking statements are reasonable, any of the assumptions could prove inaccurate and, therefore, there can be no assurance that the results contemplated in the forward-looking statements will be realized. In light of the significant uncertainties inherent in the forward-looking information included herein, the inclusion of such information should not be regarded as a representation by Tegal or any other person that Tegal's objectives or plans will be realized. Tegal undertakes no obligation to revise the forward-looking statements contained herein to reflect such events or circumstances after the date hereof or to reflect the occurrence of unanticipated events.
About Tegal
Tegal provides process and equipment solutions to leading-edge suppliers of advanced semiconductor and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal's system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits. More information is available on the Internet at: www.tegal.com.
Tegal Corporation
Vahan Tchakerian, 707-763-5600
Fax: 707-773-3015
vtchakerian@tegal.com
or
Loomis Group, Inc.
Julie Lass, 512-328-8855
Fax: 512-457-9400
lassj@loomisgroup.com
